Atomic Layer Deposition of MgF2Thin Films Using TaF5as a Novel Fluorine Source

出版年份 2008 全文链接

标题

Atomic Layer Deposition of MgF2Thin Films Using TaF5as a Novel Fluorine Source

作者

关键词

-

出版物

CHEMISTRY OF MATERIALS

Volume 20, Issue 15, Pages 5023-5028

出版商

American Chemical Society (ACS)

发表日期

2008-06-21

DOI

10.1021/cm800948k

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Protocol

Reagent

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