Growth and phase stabilization of HfO2 thin films by ALD using novel precursors

标题
Growth and phase stabilization of HfO2 thin films by ALD using novel precursors
作者
关键词
-
出版物
JOURNAL OF CRYSTAL GROWTH
Volume 312, Issue 2, Pages 245-249
出版商
Elsevier BV
发表日期
2009-10-22
DOI
10.1016/j.jcrysgro.2009.10.028

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