Low leakage Ru-strontium titanate-Ru metal-insulator-metal capacitors for sub-20 nm technology node in dynamic random access memory

Mesoscopic analysis of leakage current suppression in ZrO2/Al2O3/ZrO2 nano-laminates

(2013) Dominik Martin et al.   JOURNAL OF APPLIED PHYSICS

Growth of Conductive SrRuO3 Films by Combining Atomic Layer Deposited SrO and Chemical Vapor Deposited RuO2 Layers

(2012) Jeong Hwan Han et al.   CHEMISTRY OF MATERIALS

Impact of the Plasma Ambient and the Ruthenium Precursor on the Growth of Ruthenium Films by Plasma Enhanced Atomic Layer Deposition

(2012) J. Swerts et al.   ECS Solid State Letters

Impact of bottom electrode and SrxTiyOz film formation on physical and electrical properties of metal-insulator-metal capacitors

(2011) M. A. Pawlak et al.   APPLIED PHYSICS LETTERS

Improved EOT and leakage current for metal–insulator–metal capacitor stacks with rutile TiO2

(2011) Mihaela Popovici et al.   MICROELECTRONIC ENGINEERING

SrTiO3 thin film capacitors on silicon substrates with insignificant interfacial passive layers

(2010) S. Schmelzer et al.   APPLIED PHYSICS LETTERS

Impact of crystallization behavior of SrxTiyOz films on electrical properties of metal-insulator-metal capacitors with TiN electrodes

(2010) M. A. Pawlak et al.   APPLIED PHYSICS LETTERS

Poole−Frenkel Effect and Phonon-Assisted Tunneling in GaAs Nanowires

(2010) Aaron M. Katzenmeyer et al.   NANO LETTERS

Electronic Conduction Mechanism of SrTiO[sub 3] Thin Film Grown on Ru Electrode by Atomic Layer Deposition

(2009) Sang Woon Lee et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Electrode effects on the conduction mechanisms in HfO2-based metal-insulator-metal capacitors

(2009) F. El Kamel et al.   JOURNAL OF APPLIED PHYSICS

Composition influence on the physical and electrical properties of SrxTi1−xOy-based metal-insulator-metal capacitors prepared by atomic layer deposition using TiN bottom electrodes

(2009) N. Menou et al.   JOURNAL OF APPLIED PHYSICS

Atomic Layer Deposition of Strontium Titanate Films Using Sr([sup t]Bu[sub 3]Cp)[sub 2] and Ti(OMe)[sub 4]

(2009) M. Popovici et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Epitaxial growth of high-κ TiO[sub 2] rutile films on RuO[sub 2] electrodes

(2009) K. Fröhlich et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Al-Doped TiO2 Films with Ultralow Leakage Currents for Next Generation DRAM Capacitors

(2008) Seong Keun Kim et al.   ADVANCED MATERIALS

Enhanced electrical properties of SrTiO3 thin films grown by atomic layer deposition at high temperature for dynamic random access memory applications

(2008) Sang Woon Lee et al.   APPLIED PHYSICS LETTERS