Improved EOT and leakage current for metal–insulator–metal capacitor stacks with rutile TiO2

Published 2011 View Full Article

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Title
Improved EOT and leakage current for metal–insulator–metal capacitor stacks with rutile TiO2
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 7, Pages 1517-1520
Publisher
Elsevier BV
Online
2011-04-06
DOI
10.1016/j.mee.2011.03.063

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