Ultra-violet light enhanced super critical fluid treatment in In-Ga-Zn-O thin film transistor
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Title
Ultra-violet light enhanced super critical fluid treatment in In-Ga-Zn-O thin film transistor
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 104, Issue 24, Pages 243508
Publisher
AIP Publishing
Online
2014-06-19
DOI
10.1063/1.4883899
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