Dehydroxyl effect of Sn-doped silicon oxide resistance random access memory with supercritical CO2 fluid treatment

Title
Dehydroxyl effect of Sn-doped silicon oxide resistance random access memory with supercritical CO2 fluid treatment
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 101, Issue 11, Pages 112906
Publisher
AIP Publishing
Online
2012-09-15
DOI
10.1063/1.4750235

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