Origin of Hopping Conduction in Sn-Doped Silicon Oxide RRAM With Supercritical $\hbox{CO}_{2}$ Fluid Treatment

Title
Origin of Hopping Conduction in Sn-Doped Silicon Oxide RRAM With Supercritical $\hbox{CO}_{2}$ Fluid Treatment
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 33, Issue 12, Pages 1693-1695
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2012-10-23
DOI
10.1109/led.2012.2217932

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