A low-temperature method for improving the performance of sputter-deposited ZnO thin-film transistors with supercritical fluid

Published 2009 View Full Article

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Title
A low-temperature method for improving the performance of sputter-deposited ZnO thin-film transistors with supercritical fluid
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 16, Pages 162111
Publisher
AIP Publishing
Online
2009-04-24
DOI
10.1063/1.3124658

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