Surface reactivity and oxygen migration in amorphous indium-gallium-zinc oxide films annealed in humid atmosphere

Title
Surface reactivity and oxygen migration in amorphous indium-gallium-zinc oxide films annealed in humid atmosphere
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 103, Issue 20, Pages 201904
Publisher
AIP Publishing
Online
2013-11-13
DOI
10.1063/1.4829996

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