Surface reactivity and oxygen migration in amorphous indium-gallium-zinc oxide films annealed in humid atmosphere

标题
Surface reactivity and oxygen migration in amorphous indium-gallium-zinc oxide films annealed in humid atmosphere
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 103, Issue 20, Pages 201904
出版商
AIP Publishing
发表日期
2013-11-13
DOI
10.1063/1.4829996

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