Depth analysis of subgap electronic states in amorphous oxide semiconductor, a-In-Ga-Zn-O, studied by hard x-ray photoelectron spectroscopy

Title
Depth analysis of subgap electronic states in amorphous oxide semiconductor, a-In-Ga-Zn-O, studied by hard x-ray photoelectron spectroscopy
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 109, Issue 7, Pages 073726
Publisher
AIP Publishing
Online
2011-04-18
DOI
10.1063/1.3560769

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