Giant Piezoelectricity on Si for Hyperactive MEMS

Title
Giant Piezoelectricity on Si for Hyperactive MEMS
Authors
Keywords
-
Journal
SCIENCE
Volume 334, Issue 6058, Pages 958-961
Publisher
American Association for the Advancement of Science (AAAS)
Online
2011-11-18
DOI
10.1126/science.1207186

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