Atomic layer deposited zinc tin oxide channel for amorphous oxide thin film transistors
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Title
Atomic layer deposited zinc tin oxide channel for amorphous oxide thin film transistors
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 101, Issue 11, Pages 113507
Publisher
AIP Publishing
Online
2012-09-15
DOI
10.1063/1.4752727
References
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Related references
Note: Only part of the references are listed.- Atomic layer deposition of tin oxide with nitric oxide as an oxidant gas
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- (2011) Haifeng Pu et al. SEMICONDUCTOR SCIENCE AND TECHNOLOGY
- The status and perspectives of metal oxide thin-film transistors for active matrix flexible displays
- (2011) Jae Kyeong Jeong SEMICONDUCTOR SCIENCE AND TECHNOLOGY
- Review of recent developments in amorphous oxide semiconductor thin-film transistor devices
- (2011) Joon Seok Park et al. THIN SOLID FILMS
- Low Temperature Atomic Layer Deposition of Tin Oxide
- (2010) Jaeyeong Heo et al. CHEMISTRY OF MATERIALS
- Kinetics of Stop-Flow Atomic Layer Deposition for High Aspect Ratio Template Filling through Photonic Band Gap Measurements
- (2010) Siva Krishna Karuturi et al. Journal of Physical Chemistry C
- Present status of amorphous In–Ga–Zn–O thin-film transistors
- (2010) Toshio Kamiya et al. SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS
- Atomic Layer Deposition: An Overview
- (2009) Steven M. George CHEMICAL REVIEWS
- Area-Selective ALD with Soft Lithographic Methods: Using Self-Assembled Monolayers to Direct Film Deposition
- (2009) Xirong Jiang et al. Journal of Physical Chemistry C
- High performance solution-processed amorphous zinc tin oxide thin film transistor
- (2009) Seok-Jun Seo et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Area-Selective Atomic Layer Deposition Using Self-Assembled Monolayer and Scanning Probe Lithography
- (2009) Wonyoung Lee et al. JOURNAL OF THE ELECTROCHEMICAL SOCIETY
- Inkjet-Printed Zinc Tin Oxide Thin-Film Transistor
- (2009) Dongjo Kim et al. LANGMUIR
- Combinatorial study of zinc tin oxide thin-film transistors
- (2008) M. G. McDowell et al. APPLIED PHYSICS LETTERS
- Carrier concentration dependence of Ti∕Au specific contact resistance on n-type amorphous indium zinc oxide thin films
- (2008) Wantae Lim et al. APPLIED PHYSICS LETTERS
- Specific contact resistances between amorphous oxide semiconductor In–Ga–Zn–O and metallic electrodes
- (2007) Yasuhiro Shimura et al. THIN SOLID FILMS
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