Kinetics of Stop-Flow Atomic Layer Deposition for High Aspect Ratio Template Filling through Photonic Band Gap Measurements

Published 2010 View Full Article

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Title
Kinetics of Stop-Flow Atomic Layer Deposition for High Aspect Ratio Template Filling through Photonic Band Gap Measurements
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 114, Issue 35, Pages 14843-14848
Publisher
American Chemical Society (ACS)
Online
2010-08-17
DOI
10.1021/jp1053748

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