Atomic layer deposition of tin oxide with nitric oxide as an oxidant gas
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Title
Atomic layer deposition of tin oxide with nitric oxide as an oxidant gas
Authors
Keywords
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Journal
JOURNAL OF MATERIALS CHEMISTRY
Volume 22, Issue 11, Pages 4599
Publisher
Royal Society of Chemistry (RSC)
Online
2012-02-03
DOI
10.1039/c2jm16557k
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