Influence of trimethylaluminum on the growth and properties of HfO2/In0.53Ga0.47As interfaces

Title
Influence of trimethylaluminum on the growth and properties of HfO2/In0.53Ga0.47As interfaces
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 98, Issue 5, Pages 052911
Publisher
AIP Publishing
Online
2011-02-04
DOI
10.1063/1.3553275

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