Uniform Growth of AlGaN/GaN High Electron Mobility Transistors on 200 mm Silicon (111) Substrate

Title
Uniform Growth of AlGaN/GaN High Electron Mobility Transistors on 200 mm Silicon (111) Substrate
Authors
Keywords
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Journal
Applied Physics Express
Volume 6, Issue 2, Pages 026501
Publisher
Japan Society of Applied Physics
Online
2013-01-24
DOI
10.7567/apex.6.026501

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