A Universal Scheme for Patterning of Oxides via Thermal Nanoimprint Lithography

Title
A Universal Scheme for Patterning of Oxides via Thermal Nanoimprint Lithography
Authors
Keywords
-
Journal
ADVANCED FUNCTIONAL MATERIALS
Volume 23, Issue 17, Pages 2201-2211
Publisher
Wiley
Online
2012-11-28
DOI
10.1002/adfm.201202577

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