Direct nanoimprint lithography of Al2O3using a chelated monomer-based precursor

Published 2012 View Full Article

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Title
Direct nanoimprint lithography of Al2O3using a chelated monomer-based precursor
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 23, Issue 31, Pages 315304
Publisher
IOP Publishing
Online
2012-07-17
DOI
10.1088/0957-4484/23/31/315304

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