Extended Arrays of Vertically Aligned Sub-10 nm Diameter [100] Si Nanowires by Metal-Assisted Chemical Etching

Published 2008 View Full Article

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Title
Extended Arrays of Vertically Aligned Sub-10 nm Diameter [100] Si Nanowires by Metal-Assisted Chemical Etching
Authors
Keywords
-
Journal
NANO LETTERS
Volume 8, Issue 9, Pages 3046-3051
Publisher
American Chemical Society (ACS)
Online
2008-08-13
DOI
10.1021/nl802324y

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