CMOS-Compatible Silicon Nanowire Field-Effect Transistor Biosensor: Technology Development toward Commercialization

High Density Individually Addressable Nanowire Arrays Record Intracellular Activity from Primary Rodent and Human Stem Cell Derived Neurons

(2017) Ren Liu et al.   NANO LETTERS

Feasibility Study of Extended-Gate-Type Silicon Nanowire Field-Effect Transistors for Neural Recording

(2017) Hongki Kang et al.   SENSORS

Self-Assembled InAs Nanowires as Optical Reflectors

(2017) Francesco Floris et al.   Nanomaterials

Detection of K+ Efflux from Stimulated Cortical Neurons by an Aptamer-Modified Silicon Nanowire Field-Effect Transistor

(2017) Ankur Anand et al.   ACS Sensors

Toward Intraoperative Detection of Disseminated Tumor Cells in Lymph Nodes with Silicon Nanowire Field Effect Transistors

(2016) Duy P. Tran et al.   ACS Nano

Silicon Nanowire Sensors Enable Diagnosis of Patients via Exhaled Breath

(2016) Nisreen Shehada et al.   ACS Nano

Electrical detection of dengue virus (DENV) DNA oligomer using silicon nanowire biosensor with novel molecular gate control

(2016) M. Nuzaihan M.N. et al.   BIOSENSORS & BIOELECTRONICS

A microfluidic device integrating dual CMOS polysilicon nanowire sensors for on-chip whole blood processing and simultaneous detection of multiple analytes

(2016) Da-Han Kuan et al.   LAB ON A CHIP

Fabrication of single-crystal silicon nanotubes with sub-10 nm walls using cryogenic inductively coupled plasma reactive ion etching

(2016) Zhiqin Li et al.   NANOTECHNOLOGY

A CMOS silicon spin qubit

(2016) R. Maurand et al.   Nature Communications

Complementary Metal Oxide Semiconductor Compatible Silicon Nanowires-on-a-Chip: Fabrication and Preclinical Validation for the Detection of a Cancer Prognostic Protein Marker in Serum

(2015) Duy P. Tran et al.   ANALYTICAL CHEMISTRY

Metal assisted anodic etching of silicon

(2015) Chang Quan Lai et al.   Nanoscale

Isolation and Identification of Post-Transcriptional Gene Silencing-Related Micro-RNAs by Functionalized Silicon Nanowire Field-effect Transistor

(2015) Kuan-I Chen et al.   Scientific Reports

Multiple Silicon Nanowires with Enzymatic Modification for Measuring Glucose Concentration

(2015) Cheng-Chih Hsu et al.   Micromachines

Photoresponsive properties of ultrathin silicon nanowires

(2014) Duy P. Tran et al.   APPLIED PHYSICS LETTERS

Silicon nanowire field-effect-transistor based biosensors: From sensitive to ultra-sensitive

(2014) Mo-Yuan Shen et al.   BIOSENSORS & BIOELECTRONICS

A device design of an integrated CMOS poly-silicon biosensor-on-chip to enhance performance of biomolecular analytes in serum samples

(2014) Yen Pei-Wen et al.   BIOSENSORS & BIOELECTRONICS

Long Term Stability of Nanowire Nanoelectronics in Physiological Environments

(2014) Wei Zhou et al.   NANO LETTERS

Artificial Sensing Intelligence with Silicon Nanowires for Ultraselective Detection in the Gas Phase

(2014) Bin Wang et al.   NANO LETTERS

Direct ultrasensitive electrical detection of prostate cancer biomarkers with CMOS-compatible n- and p-type silicon nanowire sensor arrays

(2014) Anran Gao et al.   Nanoscale

Single Si nanowire (diameter ≤ 100 nm) based polarization sensitive near-infrared photodetector with ultra-high responsivity

(2014) K. Das et al.   Nanoscale

Nanowire nanocomputer as a finite-state machine

(2014) J. Yao et al.   PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA

On the origin of enhanced sensitivity in nanoscale FET-based biosensors

(2014) K. Shoorideh et al.   PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA

Fabrication of locally thinned down silicon nanowires

(2014) Duy Phu Tran et al.   Journal of Materials Chemistry C

Effect of Functional Groups on the Sensing Properties of Silicon Nanowires toward Volatile Compounds

(2013) Bin Wang et al.   ACS Applied Materials & Interfaces

High Performance of Silicon Nanowire-Based Biosensors using a High-k Stacked Sensing Thin Film

(2013) Tae-Eon Bae et al.   ACS Applied Materials & Interfaces

Decoupling Diameter and Pitch in Silicon Nanowire Arrays Made by Metal-Assisted Chemical Etching

(2013) Junghoon Yeom et al.   ADVANCED FUNCTIONAL MATERIALS

Effect of Biointerfacing Linker Chemistries on the Sensitivity of Silicon Nanowires for Protein Detection

(2013) Brian Dorvel et al.   ANALYTICAL CHEMISTRY

Electrical shielding for silicon nanowire biosensor in microchannels

(2013) Songyue Chen et al.   APPLIED PHYSICS LETTERS

Electrical properties of high density arrays of silicon nanowire field effect transistors

(2013) Hye-Young Kim et al.   JOURNAL OF APPLIED PHYSICS

An Ultrasensitive Nanowire-Transistor Biosensor for Detecting Dopamine Release from Living PC12 Cells under Hypoxic Stimulation

(2013) Bor-Ran Li et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

Signal-to-Noise Ratio Enhancement of Silicon Nanowires Biosensor with Rolling Circle Amplification

(2013) Anran Gao et al.   NANO LETTERS

Free-standing kinked nanowire transistor probes for targeted intracellular recording in three dimensions

(2013) Quan Qing et al.   Nature Nanotechnology

Atomistics of vapour–liquid–solid nanowire growth

(2013) Hailong Wang et al.   Nature Communications

Core-shell silicon nanowire solar cells

(2013) M. M. Adachi et al.   Scientific Reports

Field-Effect Transistors Based on Silicon Nanowire Arrays: Effect of the Good and the Bad Silicon Nanowires

(2012) Bin Wang et al.   ACS Applied Materials & Interfaces

Silicon Nanowires with High-k Hafnium Oxide Dielectrics for Sensitive Detection of Small Nucleic Acid Oligomers

(2012) Brian R. Dorvel et al.   ACS Nano

Silicon nanowire biosensor and its applications in disease diagnostics: A review

(2012) Guo-Jun Zhang et al.   ANALYTICA CHIMICA ACTA

Quantitative studies of long-term stable, top-down fabricated silicon nanowire pH sensors

(2012) Sun Choi et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Quantification of surface etching by common buffers and implications on the accuracy of label-free biological assays

(2012) Sunmin Ahn et al.   BIOSENSORS & BIOELECTRONICS

Multiplexed detection of cardiac biomarkers in serum with nanowire arrays using readout ASIC

(2012) Guo-Jun Zhang et al.   BIOSENSORS & BIOELECTRONICS

Semiconductor Nanowire Fabrication by Bottom-Up and Top-Down Paradigms

(2012) Richard G. Hobbs et al.   CHEMISTRY OF MATERIALS

Electrical Properties of Silicon Nanowire Fabricated by Patterning and Oxidation Process

(2012) Min-Hyun Lee et al.   IEEE TRANSACTIONS ON NANOTECHNOLOGY

Synthetic antibodies: Concepts, potential and practical considerations

(2012) S. Miersch et al.   METHODS

Biorecognition Layer Engineering: Overcoming Screening Limitations of Nanowire-Based FET Devices

(2012) Roey Elnathan et al.   NANO LETTERS

Si Nanowires Forest-Based On-Chip Biomolecular Filtering, Separation and Preconcentration Devices: Nanowires Do it All

(2012) Vadim Krivitsky et al.   NANO LETTERS

Enhanced Sensing of Nucleic Acids with Silicon Nanowire Field Effect Transistor Biosensors

(2012) Anran Gao et al.   NANO LETTERS

Macroporous nanowire nanoelectronic scaffolds for synthetic tissues

(2012) Bozhi Tian et al.   NATURE MATERIALS

Quantification of the affinities and kinetics of protein interactions using silicon nanowire biosensors

(2012) Xuexin Duan et al.   Nature Nanotechnology

An invisible metal–semiconductor photodetector

(2012) Pengyu Fan et al.   Nature Photonics

A CMOS-Compatible Poly-Si Nanowire Device with Hybrid Sensor/Memory Characteristics for System-on-Chip Applications

(2012) Min-Cheng Chen et al.   SENSORS

Enhanced Sensing of Nonpolar Volatile Organic Compounds by Silicon Nanowire Field Effect Transistors

(2011) Yair Paska et al.   ACS Nano

Effect of Nanowire Number, Diameter, and Doping Density on Nano-FET Biosensor Sensitivity

(2011) Jason Li et al.   ACS Nano

Wafer-Scale High-Throughput Ordered Arrays of Si and Coaxial Si/Si1–xGex Wires: Fabrication, Characterization, and Photovoltaic Application

(2011) Caofeng Pan et al.   ACS Nano

Optimal signal-to-noise ratio for silicon nanowire biochemical sensors

(2011) Nitin K. Rajan et al.   APPLIED PHYSICS LETTERS

High-k dielectric Al2O3 nanowire and nanoplate field effect sensors for improved pH sensing

(2011) Bobby Reddy et al.   BIOMEDICAL MICRODEVICES

Immobilization strategies to develop enzymatic biosensors

(2011) Audrey Sassolas et al.   BIOTECHNOLOGY ADVANCES

Integrating Silicon Nanowire Field Effect Transistor, Microfluidics and Air Sampling Techniques For Real-Time Monitoring Biological Aerosols

(2011) Fangxia Shen et al.   ENVIRONMENTAL SCIENCE & TECHNOLOGY

Silicon Nanowire Tunnel FETs: Low-Temperature Operation and Influence of High- $k$ Gate Dielectric

(2011) K. E. Moselund et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

DNA immobilization, delivery and cleavage on solid supports

(2011) Vikram Singh et al.   JOURNAL OF MATERIALS CHEMISTRY

Ultrasensitive protein detection using lithographically defined Si multi-nanowire field effect transistors

(2011) Ruhai Tian et al.   LAB ON A CHIP

Silicon nanowires by combined nanoimprint and angle deposition for gas sensing applications

(2011) Chen Gao et al.   MICROELECTRONIC ENGINEERING

Al2O3/Silicon NanoISFET with Near Ideal Nernstian Response

(2011) Songyue Chen et al.   NANO LETTERS

Quantum Confinement Induced Performance Enhancement in Sub-5-nm Lithographic Si Nanowire Transistors

(2011) Krutarth Trivedi et al.   NANO LETTERS

Silicon-Nanowire-Based CMOS-Compatible Field-Effect Transistor Nanosensors for Ultrasensitive Electrical Detection of Nucleic Acids

(2011) Anran Gao et al.   NANO LETTERS

Silicon nanowire field-effect transistor-based biosensors for biomedical diagnosis and cellular recording investigation

(2011) Kuan-I Chen et al.   Nano Today

Correlation between the performance and microstructure of Ti/Al/Ti/Au Ohmic contacts to p-type silicon nanowires

(2011) Abhishek Motayed et al.   NANOTECHNOLOGY

Optimization of pH sensing using silicon nanowire field effect transistors with HfO2as the sensing surface

(2011) Sufi Zafar et al.   NANOTECHNOLOGY

Periodically porous top electrodes on vertical nanowire arrays for highly sensitive gas detection

(2011) Hyun Jin In et al.   NANOTECHNOLOGY

An integrated semiconductor device enabling non-optical genome sequencing

(2011) Jonathan M. Rothberg et al.   NATURE

Choosing an effective protein bioconjugation strategy

(2011) Nicholas Stephanopoulos et al.   Nature Chemical Biology

Electrical contacts to one- and two-dimensional nanomaterials

(2011) François Léonard et al.   Nature Nanotechnology

Comparative advantages of mechanical biosensors

(2011) J.L. Arlett et al.   Nature Nanotechnology

Molecular Analysis of Blood with Micro-/Nanoscale Field-Effect-Transistor Biosensors

(2011) Matthew S. Makowski et al.   Small

All-(111) Surface Silicon Nanowires: Selective Functionalization for Biosensing Applications

(2010) M. N. Masood et al.   ACS Applied Materials & Interfaces

Supersensitive Detection of Explosives by Silicon Nanowire Arrays

(2010) Yoni Engel et al.   ANGEWANDTE CHEMIE-INTERNATIONAL EDITION

Fabrication of Silicon Nanowires with Precise Diameter Control Using Metal Nanodot Arrays as a Hard Mask Blocking Material in Chemical Etching

(2010) Jinquan Huang et al.   CHEMISTRY OF MATERIALS

Polysilicon Nanowire Transistors and Arrays Fabricated With the Multispacer Technique

(2010) M. Haykel Ben Jamaa et al.   IEEE TRANSACTIONS ON NANOTECHNOLOGY

Nucleation and growth of epitaxial silicide in silicon nanowires

(2010) Yi-Chia Chou et al.   MATERIALS SCIENCE & ENGINEERING R-REPORTS

Ultradense silicon nanowire arrays produced via top-down planar technology

(2010) M. Ferri et al.   MICROELECTRONIC ENGINEERING

Ultrahigh Responsivity Visible and Infrared Detection Using Silicon Nanowire Phototransistors

(2010) Arthur Zhang et al.   NANO LETTERS

Nonlithographic Patterning and Metal-Assisted Chemical Etching for Manufacturing of Tunable Light-Emitting Silicon Nanowire Arrays

(2010) Winston Chern et al.   NANO LETTERS

Growth of Nickel Silicides in Si and Si/SiOx Core/Shell Nanowires

(2010) Yung-Chen Lin et al.   NANO LETTERS

Nernst Limit in Dual-Gated Si-Nanowire FET Sensors

(2010) O. Knopfmacher et al.   NANO LETTERS

Light Trapping in Silicon Nanowire Solar Cells

(2010) Erik Garnett et al.   NANO LETTERS

Top-down fabrication of shape controllable Si nanowires based on conventional CMOS process

(2010) Yujie Ai et al.   PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES

Nanowire transistor arrays for mapping neural circuits in acute brain slices

(2010) Q. Qing et al.   PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA

Colloquium: Structural, electronic, and transport properties of silicon nanowires

(2010) Riccardo Rurali   REVIEWS OF MODERN PHYSICS

Three-Dimensional, Flexible Nanoscale Field-Effect Transistors as Localized Bioprobes

(2010) B. Tian et al.   SCIENCE

Silicon nanowire biosensor for highly sensitive and rapid detection of Dengue virus

(2010) Guo-Jun Zhang et al.   SENSORS AND ACTUATORS B-CHEMICAL

Label-Free Attomolar Detection of Proteins Using Integrated Nanoelectronic and Electrokinetic Devices

(2010) Jian-Ru Gong   Small

Top-Down Fabrication of Sub-30 nm Monocrystalline Silicon Nanowires Using Conventional Microfabrication

(2009) Songyue Chen et al.   ACS Nano

Silicon Nanowires: A Review on Aspects of their Growth and their Electrical Properties

(2009) Volker Schmidt et al.   ADVANCED MATERIALS

Silicon nanowire sensors for Hg2+ and Cd2+ ions

(2009) Linbao Luo et al.   APPLIED PHYSICS LETTERS

Action potentials of HL-1 cells recorded with silicon nanowire transistors

(2009) Jan Felix Eschermann et al.   APPLIED PHYSICS LETTERS

Poly-silicon nanowire field-effect transistor for ultrasensitive and label-free detection of pathogenic avian influenza DNA

(2009) Chih-Heng Lin et al.   BIOSENSORS & BIOELECTRONICS

Oligopeptide-modified silicon nanowire arrays as multichannel metal ion sensors

(2009) Xinyan Bi et al.   BIOSENSORS & BIOELECTRONICS

Label-free biosensing of a gene mutation using a silicon nanowire field-effect transistor

(2009) Chi-Chang Wu et al.   BIOSENSORS & BIOELECTRONICS

Orientation dependence of nickel silicide formation in contacts to silicon nanowires

(2009) N. S. Dellas et al.   JOURNAL OF APPLIED PHYSICS

$P$-type Si-nanowire-based Field-effect Transistors for Electric Detection of a Biomarker: Matrix Metalloproteinase-9

(2009) SeungHyun Lee et al.   JOURNAL OF THE KOREAN PHYSICAL SOCIETY

Nanoimprint lithography stamp modification utilizing focused ion beams

(2009) Heinz D. Wanzenboeck et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

22nm silicon nanowire gas sensor fabricated by trilayer nanoimprint and wet etching

(2009) Chen Gao et al.   MICROELECTRONIC ENGINEERING

Homogeneous Nucleation of Epitaxial CoSi2and NiSi in Si Nanowires

(2009) Yi-Chia Chou et al.   NANO LETTERS

Probing Flow Velocity with Silicon Nanowire Sensors

(2009) Dong Rip Kim et al.   NANO LETTERS

Electrical Recording from Hearts with Flexible Nanowire Device Arrays

(2009) Brian P. Timko et al.   NANO LETTERS

InAs Nanowire Transistors as Gas Sensor and the Response Mechanism

(2009) Juan Du et al.   NANO LETTERS

Novel Top-Down Wafer-Scale Fabrication of Single Crystal Silicon Nanowires

(2009) Hien Duy Tong et al.   NANO LETTERS

Control of channel doping concentration for enhancing the sensitivity of ‘top-down’ fabricated Si nanochannel FET biosensors

(2009) Chan Woo Park et al.   NANOTECHNOLOGY

Multi-silicon ridge nanofabrication by repeated edge lithography

(2009) Yiping Zhao et al.   NANOTECHNOLOGY

Label-free biomarker detection from whole blood

(2009) Eric Stern et al.   Nature Nanotechnology

Label-free detection of protein-protein interactions using a calmodulin-modified nanowire transistor

(2009) T.-W. Lin et al.   PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA

Detection of an uncharged steroid with a silicon nanowire field-effect transistor

(2009) Ko Shing Chang et al.   SENSORS AND ACTUATORS B-CHEMICAL

Superlattice Nanowire Pattern Transfer (SNAP)

(2008) James R. Heath   ACCOUNTS OF CHEMICAL RESEARCH

Recent advances in immobilization methods of antibodies on solid supports

(2008) Yongwon Jung et al.   ANALYST

Ultrasensitive carbon nanotube-based biosensors using antibody-binding fragments

(2008) Jun Pyo Kim et al.   ANALYTICAL BIOCHEMISTRY

Silicon-based nanochannel glucose sensor

(2008) Xihua Wang et al.   APPLIED PHYSICS LETTERS

A possibility of detection of the non-charge based analytes using ultra-thin body field-effect transistors

(2008) J.-T. Sheu et al.   BIOSENSORS & BIOELECTRONICS

Highly sensitive measurements of PNA-DNA hybridization using oxide-etched silicon nanowire biosensors

(2008) Guo-Jun Zhang et al.   BIOSENSORS & BIOELECTRONICS

Novel poly-silicon nanowire field effect transistor for biosensing application

(2008) Cheng-Yun Hsiao et al.   BIOSENSORS & BIOELECTRONICS

Ultrasensitive detection of dopamine using a polysilicon nanowire field-effect transistor

(2008) Chih-Heng Lin et al.   CHEMICAL COMMUNICATIONS

Real-Time, Label-Free Detection of Biological Entities Using Nanowire-Based FETs

(2008) M. Curreli et al.   IEEE TRANSACTIONS ON NANOTECHNOLOGY

Peptide−Nanowire Hybrid Materials for Selective Sensing of Small Molecules

(2008) Michael C. McAlpine et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

Nickel and nickel silicide Schottky barrier contacts to n-type silicon nanowires

(2008) S. M. Woodruff et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Ultra-sensitive detection of bacterial toxin with silicon nanowire transistor

(2008) Nirankar N. Mishra et al.   LAB ON A CHIP

Sub-10nm silicon ridge nanofabrication by advanced edge lithography for NIL applications

(2008) Yiping Zhao et al.   MICROELECTRONIC ENGINEERING

Numerical Characterization and Optimization of the Microfluidics for Nanowire Biosensors

(2008) Dong Rip Kim et al.   NANO LETTERS

A Universal Expression of Band Gap for Silicon Nanowires of Different Cross-Section Geometries

(2008) Donglai Yao et al.   NANO LETTERS

Single Crystalline PtSi Nanowires, PtSi/Si/PtSi Nanowire Heterostructures, and Nanodevices

(2008) Yung-Chen Lin et al.   NANO LETTERS

In-situ TEM Observation of Repeating Events of Nucleation in Epitaxial Growth of Nano CoSi2in Nanowires of Si

(2008) Yi-Chia Chou et al.   NANO LETTERS

Screening-Limited Response of NanoBiosensors

(2008) Pradeep R. Nair et al.   NANO LETTERS

Silicon Nanowire Transistors with a Channel Width of 4 nm Fabricated by Atomic Force Microscope Nanolithography

(2008) J. Martinez et al.   NANO LETTERS

Making it stick: convection, reaction and diffusion in surface-based biosensors

(2008) Todd M Squires et al.   NATURE BIOTECHNOLOGY

Kinetics of amorphous silica dissolution and the paradox of the silica polymorphs

(2008) P. M. Dove et al.   PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA

The multi-spacer patterning technique: a non-lithographic technique for terascale integration

(2008) G F Cerofolini et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Surface-modified silicon nano-channel for urea sensing

(2008) Yu Chen et al.   SENSORS AND ACTUATORS B-CHEMICAL

Fabrication and application of silicon nanowire transistor arrays for biomolecular detection

(2008) X.T. Vu et al.   SENSORS AND ACTUATORS B-CHEMICAL

Fabrication of Suspended Silicon Nanowire Arrays

(2008) Kook-Nyung Lee et al.   Small

CMOS-Compatible Nanowire Sensor Arrays for Detection of Cellular Bioelectricity

(2008) Tze-Sian Pui et al.   Small