Orientation dependence of nickel silicide formation in contacts to silicon nanowires

Published 2009 View Full Article

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Title
Orientation dependence of nickel silicide formation in contacts to silicon nanowires
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 105, Issue 9, Pages 094309
Publisher
AIP Publishing
Online
2009-05-05
DOI
10.1063/1.3115453
References
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