Control of channel doping concentration for enhancing the sensitivity of ‘top-down’ fabricated Si nanochannel FET biosensors

Published 2009 View Full Article

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Title
Control of channel doping concentration for enhancing the sensitivity of ‘top-down’ fabricated Si nanochannel FET biosensors
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 20, Issue 47, Pages 475501
Publisher
IOP Publishing
Online
2009-10-27
DOI
10.1088/0957-4484/20/47/475501

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