Fabrication of Silicon Nanowires with Precise Diameter Control Using Metal Nanodot Arrays as a Hard Mask Blocking Material in Chemical Etching

Title
Fabrication of Silicon Nanowires with Precise Diameter Control Using Metal Nanodot Arrays as a Hard Mask Blocking Material in Chemical Etching
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 22, Issue 13, Pages 4111-4116
Publisher
American Chemical Society (ACS)
Online
2010-06-15
DOI
10.1021/cm101121c

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