Copper Chemical Mechanical Polishing Performances of Polystyrene/Ceria Hybrid Abrasives with a Core/Shell Structure
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Title
Copper Chemical Mechanical Polishing Performances of Polystyrene/Ceria Hybrid Abrasives with a Core/Shell Structure
Authors
Keywords
Hybrid particle, Core/shell structure, Polystyrene, Copper, Chemical mechanical polishing
Journal
Journal of Inorganic and Organometallic Polymers and Materials
Volume 28, Issue 4, Pages 1655-1663
Publisher
Springer Nature
Online
2018-03-28
DOI
10.1007/s10904-018-0840-9
References
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