Synergetic effect of benzotriazole and non-ionic surfactant on copper chemical mechanical polishing in KIO4-based slurries

Published 2014 View Full Article

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Title
Synergetic effect of benzotriazole and non-ionic surfactant on copper chemical mechanical polishing in KIO4-based slurries
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 558, Issue -, Pages 272-278
Publisher
Elsevier BV
Online
2014-02-07
DOI
10.1016/j.tsf.2014.01.086

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