Composite Polymer Core–Ceria Shell Abrasive Particles during Oxide CMP: A Defectivity Study

Published 2008 View Full Article

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Title
Composite Polymer Core–Ceria Shell Abrasive Particles during Oxide CMP: A Defectivity Study
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 155, Issue 9, Pages H653
Publisher
The Electrochemical Society
Online
2008-07-29
DOI
10.1149/1.2949085
References
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