High-aspect-ratio nanoimprint process chains

Highly Sensitive Waveguide Bragg Grating Temperature Sensor Using Hybrid Polymers

(2016) Nuria Teigell Beneitez et al.   IEEE PHOTONICS TECHNOLOGY LETTERS

Integrated Photonic Nanofences: Combining Subwavelength Waveguides with an Enhanced Evanescent Field for Sensing Applications

(2015) Victor J. Cadarso et al.   ACS Nano

Nanoimprint lithography: 2D or not 2D? A review

(2015) Helmut Schift   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Development and characterization of ultra high aspect ratio microstructures made by ultra deep X-ray lithography

(2015) Vladimir Nazmov et al.   JOURNAL OF MATERIALS PROCESSING TECHNOLOGY

Permeability thickness dependence of polydimethylsiloxane (PDMS) membranes

(2015) G. Firpo et al.   JOURNAL OF MEMBRANE SCIENCE

Vacuum-driven power-free microfluidics utilizing the gas solubility or permeability of polydimethylsiloxane (PDMS)

(2015) Linfeng Xu et al.   LAB ON A CHIP

Removal of residual layer by liquid transfer imprint lithography using roll-to-roll UV-NIL

(2015) Masatoshi Moro et al.   MICROELECTRONIC ENGINEERING

Aspects of cavity filling with nano imprint

(2014) Hella-C. Scheer et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Fabrication of Micro/Nano Structures on Metals by Femtosecond Laser Micromachining

(2014) K. Ahmmed et al.   Micromachines

Nanoimprint lithography and micro-embossing in LiGA technology: similarities and differences

(2013) Helmut Schift   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Direct imprinting of organic–inorganic hybrid materials into high aspect ratio sub-100 nm structures

(2013) V. J. Cadarso et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Challenges with high aspect ratio nanoimprint

(2013) Hella-Christin Scheer et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Tailored 3D Mechanical Metamaterials Made by Dip-in Direct-Laser-Writing Optical Lithography

(2012) Tiemo Bückmann et al.   ADVANCED MATERIALS

Ultra thick epoxy-based dry-film resist for high aspect ratios

(2012) N. Wangler et al.   MICROELECTRONIC ENGINEERING

Heterogeneous material micro-transfer by ink-jet print assisted mould filling

(2012) V.J. Cadarso et al.   MICROELECTRONIC ENGINEERING

Direct writing laser of high aspect ratio epoxy microstructures

(2010) V J Cadarso et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Mechanical characteristics of an Ormocomp® biocompatible hybrid photopolymer

(2010) Charalampos Schizas et al.   Journal of the Mechanical Behavior of Biomedical Materials

Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating

(2010) Sergey Gorelick et al.   NANOTECHNOLOGY

Techniques of cryogenic reactive ion etching in silicon for fabrication of sensors

(2009) M. David Henry et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Transparent hybrid polymer stamp copies with sub-50-nm resolution for thermal and UV-nanoimprint lithography

(2009) Helmut Schift et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes

(2009) Yuichiro Ezoe et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Nanoimprint lithography: An old story in modern times? A review

(2008) Helmut Schift   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Measurement of demolding forces in full wafer thermal nanoimprint

(2008) Vera Trabadelo et al.   MICROELECTRONIC ENGINEERING

Deep RIE and Cryo-Etching of Nanostructures in Silicon and Polymers

(2008) G DeRose et al.   MICROSCOPY AND MICROANALYSIS

Why you will use the deep X-ray LIG(A) technology to produce MEMS?

(2008) Pascal Meyer et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Stiction issues and actuation of RF LIGA-MEMS variable capacitors

(2008) Darcy T. Haluzan et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Soft X-ray lithography of high aspect ratio SU8 submicron structures

(2008) Elena Reznikova et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS