Atomic Layer Deposition of Crystalline MoS2 Thin Films: New Molybdenum Precursor for Low-Temperature Film Growth
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Title
Atomic Layer Deposition of Crystalline MoS2
Thin Films: New Molybdenum Precursor for Low-Temperature Film Growth
Authors
Keywords
-
Journal
Advanced Materials Interfaces
Volume 4, Issue 18, Pages 1700123
Publisher
Wiley
Online
2017-03-31
DOI
10.1002/admi.201700123
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