Wafer-scale, conformal and direct growth of MoS 2 thin films by atomic layer deposition

Published 2016 View Full Article

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Title
Wafer-scale, conformal and direct growth of MoS 2 thin films by atomic layer deposition
Authors
Keywords
MoS, 2, Atomic layer deposition, Mo(CO), 6, H, 2, S plasma, Step coverage
Journal
APPLIED SURFACE SCIENCE
Volume 365, Issue -, Pages 160-165
Publisher
Elsevier BV
Online
2016-01-08
DOI
10.1016/j.apsusc.2016.01.038

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