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Title
Atomic Layer Deposition for Graphene Device Integration
Authors
Keywords
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Journal
Advanced Materials Interfaces
Volume 4, Issue 18, Pages 1700232
Publisher
Wiley
Online
2017-05-26
DOI
10.1002/admi.201700232
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Note: Only part of the references are listed.- Hydrophobic Surface Treatment and Interrupted Atomic Layer Deposition for Highly Resistive Al2O3 Films on Graphene
- (2016) Jae Ho Jeon et al. ACS Applied Materials & Interfaces
- Parameter Space of Atomic Layer Deposition of Ultrathin Oxides on Graphene
- (2016) Adrianus I. Aria et al. ACS Applied Materials & Interfaces
- Enhanced Nucleation of High-k Dielectrics on Graphene by Atomic Layer Deposition
- (2016) Yong Hyun Park et al. CHEMISTRY OF MATERIALS
- Reactive Force Field Modeling of Zinc Oxide Nanoparticle Formation
- (2016) Craig J. Tainter et al. Journal of Physical Chemistry C
- Selective atomic layer deposition onto directly transferred monolayer graphene
- (2016) Jangheon Kim et al. MATERIALS LETTERS
- Atomic layer deposition of ZnO on graphene for thin film transistor
- (2016) Rongsheng Liu et al. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
- A non-destructive n-doping method for graphene with precise control of electronic properties via atomic layer deposition
- (2016) Kyu Seok Han et al. Nanoscale
- Continuous and ultrathin platinum films on graphene using atomic layer deposition: a combined computational and experimental study
- (2016) Bora Karasulu et al. Nanoscale
- Area-selective atomic layer deposition of platinum using photosensitive polyimide
- (2016) René H J Vervuurt et al. NANOTECHNOLOGY
- Thickness scaling of atomic-layer-deposited HfO2 films and their application to wafer-scale graphene tunnelling transistors
- (2016) Seong-Jun Jeong et al. Scientific Reports
- Encapsulation of graphene transistors and vertical device integration by interface engineering with atomic layer deposited oxide
- (2016) Jack A Alexander-Webber et al. 2D Materials
- Perfluorodecyltrichlorosilane-based seed-layer for improved chemical vapour deposition of ultrathin hafnium dioxide films on graphene
- (2016) Julia Kitzmann et al. Scientific Reports
- Growth and Characterization of Al2O3 Atomic Layer Deposition Films on sp2-Graphitic Carbon Substrates Using NO2/Trimethylaluminum Pretreatment
- (2015) Matthias J. Young et al. ACS Applied Materials & Interfaces
- Nucleation and Growth of the HfO2 Dielectric Layer for Graphene-Based Devices
- (2015) Il-Kwon Oh et al. CHEMISTRY OF MATERIALS
- In Situ Observation of Initial Stage in Dielectric Growth and Deposition of Ultrahigh Nucleation Density Dielectric on Two-Dimensional Surfaces
- (2015) Jun Hong Park et al. NANO LETTERS
- Modifying Surface Energy of Graphene via Plasma-Based Chemical Functionalization to Tune Thermal and Electrical Transport at Metal Interfaces
- (2015) Brian M. Foley et al. NANO LETTERS
- Wafer-scale single-domain-like graphene by defect-selective atomic layer deposition of hexagonal ZnO
- (2015) Kyung Sun Park et al. Nanoscale
- Highly air stable passivation of graphene based field effect devices
- (2015) Abhay A. Sagade et al. Nanoscale
- Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
- (2015) Amirhasan Nourbakhsh et al. Nanoscale
- Edge contacts of graphene formed by using a controlled plasma treatment
- (2015) D. W. Yue et al. Nanoscale
- Controlled direct growth of Al2O3-doped HfO2 films on graphene by H2O-based atomic layer deposition
- (2015) Li Zheng et al. PHYSICAL CHEMISTRY CHEMICAL PHYSICS
- Novel ALD-assisted growth of ZnO nanorods on graphene and its Cu2ZnSn(SxSe1−x)4 solar cell application
- (2015) Kejia Jiao et al. PHYSICAL CHEMISTRY CHEMICAL PHYSICS
- Damage evaluation in graphene underlying atomic layer deposition dielectrics
- (2015) Xiaohui Tang et al. Scientific Reports
- Improvement of Al2O3 Films on Graphene Grown by Atomic Layer Deposition with Pre-H2O Treatment
- (2014) Li Zheng et al. ACS Applied Materials & Interfaces
- Sub-nanometer Atomic Layer Deposition for Spintronics in Magnetic Tunnel Junctions Based on Graphene Spin-Filtering Membranes
- (2014) Marie-Blandine Martin et al. ACS Nano
- Dirac point and transconductance of top-gated graphene field-effect transistors operating at elevated temperature
- (2014) T. Hopf et al. JOURNAL OF APPLIED PHYSICS
- Two-dimensional materials for electronic applications
- (2014) Max C. Lemme et al. MRS BULLETIN
- Healing defective CVD-graphene through vapor phase treatment
- (2014) Do Van Lam et al. Nanoscale
- An alumina stabilized ZnO–graphene anode for lithium ion batteries via atomic layer deposition
- (2014) Mingpeng Yu et al. Nanoscale
- Selective metal deposition at graphene line defects by atomic layer deposition
- (2014) Kwanpyo Kim et al. Nature Communications
- Functionalized Graphene as an Ultrathin Seed Layer for the Atomic Layer Deposition of Conformal High-k Dielectrics on Graphene
- (2013) Woo Cheol Shin et al. ACS Applied Materials & Interfaces
- Direct deposition of aluminum oxide gate dielectric on graphene channel using nitrogen plasma treatment
- (2013) Taekyung Lim et al. APPLIED PHYSICS LETTERS
- A facile way to deposit conformal Al2O3 thin film on pristine graphene by atomic layer deposition
- (2013) Yan-Qiang Cao et al. APPLIED SURFACE SCIENCE
- Influence of Oxygen Exposure on the Nucleation of Platinum Atomic Layer Deposition: Consequences for Film Growth, Nanopatterning, and Nanoparticle Synthesis
- (2013) Adriaan J. M. Mackus et al. CHEMISTRY OF MATERIALS
- Carbon-nanostructures coated/decorated by atomic layer deposition: Growth and applications
- (2013) Catherine Marichy et al. COORDINATION CHEMISTRY REVIEWS
- High Frequency Performance of Graphene Transistors Grown by Chemical Vapor Deposition for Mixed Signal Applications
- (2013) Allen Hsu et al. JAPANESE JOURNAL OF APPLIED PHYSICS
- Metal Oxide Nanoparticle Growth on Graphene via Chemical Activation with Atomic Oxygen
- (2013) James E. Johns et al. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
- Quantitatively Enhanced Reliability and Uniformity of High-κ Dielectrics on Graphene Enabled by Self-Assembled Seeding Layers
- (2013) Vinod K. Sangwan et al. NANO LETTERS
- Atomic layer deposition of amorphous TiO2on graphene as an anode for Li-ion batteries
- (2013) Chunmei Ban et al. NANOTECHNOLOGY
- Atomic layer deposition of ZrO2for graphene-based multilayer structures:In situandex situcharacterization of growth process
- (2013) Aile Tamm et al. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
- Enhanced reactivity of graphene wrinkles and their function as nanosized gas inlets for reactions under graphene
- (2013) Yanhong Zhang et al. PHYSICAL CHEMISTRY CHEMICAL PHYSICS
- Atomic layer deposition of dielectrics for carbon-based electronics
- (2013) J. Kim et al. THIN SOLID FILMS
- Atomic Layer Deposition of Dielectrics on Graphene Using Reversibly Physisorbed Ozone
- (2012) Srikar Jandhyala et al. ACS Nano
- Tin Oxide with Controlled Morphology and Crystallinity by Atomic Layer Deposition onto Graphene Nanosheets for Enhanced Lithium Storage
- (2012) Xifei Li et al. ADVANCED FUNCTIONAL MATERIALS
- Seeding atomic layer deposition of high-k dielectric on graphene with ultrathin poly(4-vinylphenol) layer for enhanced device performance and reliability
- (2012) Woo Cheol Shin et al. APPLIED PHYSICS LETTERS
- Substrate-assisted nucleation of ultra-thin dielectric layers on graphene by atomic layer deposition
- (2012) B. Dlubak et al. APPLIED PHYSICS LETTERS
- Scaling of Al2O3 dielectric for graphene field-effect transistors
- (2012) B. Fallahazad et al. APPLIED PHYSICS LETTERS
- Fluorine functionalization of epitaxial graphene for uniform deposition of thin high-κ dielectrics
- (2012) Virginia Wheeler et al. CARBON
- Selective surface functionalization at regions of high local curvature in graphene
- (2012) Qingzhi Wu et al. CHEMICAL COMMUNICATIONS
- Trimethyl-aluminum and ozone interactions with graphite in atomic layer deposition of Al2O3
- (2012) Stephen McDonnell et al. JOURNAL OF APPLIED PHYSICS
- Influence of annealing and Al2O3 properties on the hydrogen-induced passivation of the Si/SiO2 interface
- (2012) G. Dingemans et al. JOURNAL OF APPLIED PHYSICS
- Growth of Pt Particles on the Anatase TiO2 (101) Surface
- (2012) Yun Zhou et al. Journal of Physical Chemistry C
- Ultrathin Oxide Films by Atomic Layer Deposition on Graphene
- (2012) Luda Wang et al. NANO LETTERS
- Graphene synthesis: relationship to applications
- (2012) Rebecca S. Edwards et al. Nanoscale
- Seeding Atomic Layer Deposition of High-k Dielectrics on Epitaxial Graphene with Organic Self-Assembled Monolayers
- (2011) Justice M. P. Alaboson et al. ACS Nano
- Contacting graphene
- (2011) Joshua A. Robinson et al. APPLIED PHYSICS LETTERS
- Impact of Plasma-Assisted Atomic-Layer-Deposited Gate Dielectric on Graphene Transistors
- (2011) Osama M. Nayfeh et al. IEEE ELECTRON DEVICE LETTERS
- Epitaxial graphene surface preparation for atomic layer deposition of Al2O3
- (2011) N. Y. Garces et al. JOURNAL OF APPLIED PHYSICS
- Enhanced Transport and Transistor Performance with Oxide Seeded High-κ Gate Dielectrics on Wafer-Scale Epitaxial Graphene
- (2011) Matthew J. Hollander et al. NANO LETTERS
- Channel Length Scaling in Graphene Field-Effect Transistors Studied with Pulsed Current−Voltage Measurements
- (2011) Inanc Meric et al. NANO LETTERS
- Graphene Annealing: How Clean Can It Be?
- (2011) Yung-Chang Lin et al. NANO LETTERS
- Assembly of iron phthalocyanine and pentacene molecules on a graphene monolayer grown on Ru(0001)
- (2011) H. G. Zhang et al. PHYSICAL REVIEW B
- Epitaxial Graphene Materials Integration: Effects of Dielectric Overlayers on Structural and Electronic Properties
- (2010) Joshua A. Robinson et al. ACS Nano
- The effect of graphite surface condition on the composition of Al2O3 by atomic layer deposition
- (2010) A. Pirkle et al. APPLIED PHYSICS LETTERS
- Graphene field-effect transistors with self-aligned gates
- (2010) Damon B. Farmer et al. APPLIED PHYSICS LETTERS
- Dielectric thickness dependence of carrier mobility in graphene with HfO2 top dielectric
- (2010) Babak Fallahazad et al. APPLIED PHYSICS LETTERS
- Characteristics of high-k Al2O3 dielectric using ozone-based atomic layer deposition for dual-gated graphene devices
- (2010) B. Lee et al. APPLIED PHYSICS LETTERS
- Graphene–dielectric integration for graphene transistors
- (2010) Lei Liao et al. MATERIALS SCIENCE & ENGINEERING R-REPORTS
- Graphene Field-Effect Transistors with High On/Off Current Ratio and Large Transport Band Gap at Room Temperature
- (2010) Fengnian Xia et al. NANO LETTERS
- Graphene transistors
- (2010) Frank Schwierz Nature Nanotechnology
- Electronic spin transport in graphene field-effect transistors
- (2010) M. Popinciuc et al. PHYSICAL REVIEW B
- Effect of high-κgate dielectrics on charge transport in graphene-based field effect transistors
- (2010) Aniruddha Konar et al. PHYSICAL REVIEW B
- Deposition of High-QualityHfO2on Graphene and the Effect of Remote Oxide Phonon Scattering
- (2010) K. Zou et al. PHYSICAL REVIEW LETTERS
- In situ studies of Al2O3 and HfO2 dielectrics on graphite
- (2009) Adam Pirkle et al. APPLIED PHYSICS LETTERS
- Observation of quantum-Hall effect in gated epitaxial graphene grown on SiC (0001)
- (2009) T. Shen et al. APPLIED PHYSICS LETTERS
- Realization of a high mobility dual-gated graphene field-effect transistor with Al2O3 dielectric
- (2009) Seyoung Kim et al. APPLIED PHYSICS LETTERS
- Bilayer PseudoSpin Field-Effect Transistor (BiSFET): A Proposed New Logic Device
- (2009) S.K. Banerjee et al. IEEE ELECTRON DEVICE LETTERS
- Ozone Adsorption on Graphene: Ab Initio Study and Experimental Validation
- (2009) Geunsik Lee et al. Journal of Physical Chemistry C
- Utilization of a Buffered Dielectric to Achieve High Field-Effect Carrier Mobility in Graphene Transistors
- (2009) Damon B. Farmer et al. NANO LETTERS
- Effect of a High-κEnvironment on Charge Carrier Mobility in Graphene
- (2009) L. A. Ponomarenko et al. PHYSICAL REVIEW LETTERS
- Tunable Stress and Controlled Thickness Modification in Graphene by Annealing
- (2008) Zhen Hua Ni et al. ACS Nano
- Atomic-layer-deposited nanostructures for graphene-based nanoelectronics
- (2008) Y. Xuan et al. APPLIED PHYSICS LETTERS
- Conformal Al2O3 dielectric layer deposited by atomic layer deposition for graphene-based nanoelectronics
- (2008) Bongki Lee et al. APPLIED PHYSICS LETTERS
- Selective-Area Atomic Layer Deposition Using Poly(methyl methacrylate) Films as Mask Layers
- (2008) Elina Färm et al. Journal of Physical Chemistry C
- Atomic Layer Deposition of Metal Oxides on Pristine and Functionalized Graphene
- (2008) Xinran Wang et al. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
- Operation of Graphene Transistors at Gigahertz Frequencies
- (2008) Yu-Ming Lin et al. NANO LETTERS
- Current saturation in zero-bandgap, top-gated graphene field-effect transistors
- (2008) Inanc Meric et al. Nature Nanotechnology
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