In situ studies of Al2O3 and HfO2 dielectrics on graphite

Published 2009 View Full Article

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Title
In situ studies of Al2O3 and HfO2 dielectrics on graphite
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 95, Issue 13, Pages 133106
Publisher
AIP Publishing
Online
2009-09-30
DOI
10.1063/1.3238560
References
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