Parameter Space of Atomic Layer Deposition of Ultrathin Oxides on Graphene

Published 2016 View Full Article

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Title
Parameter Space of Atomic Layer Deposition of Ultrathin Oxides on Graphene
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 8, Issue 44, Pages 30564-30575
Publisher
American Chemical Society (ACS)
Online
2016-10-11
DOI
10.1021/acsami.6b09596

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