Optical and structural properties of silicon oxynitride deposited by plasma enhanced chemical vapor deposition

Published 2010 View Full Article

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Title
Optical and structural properties of silicon oxynitride deposited by plasma enhanced chemical vapor deposition
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 4, Pages 1325-1333
Publisher
Elsevier BV
Online
2010-09-30
DOI
10.1016/j.tsf.2010.09.036

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