Structural and morphological studies on SiOxNy thin films

Published 2008 View Full Article

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Title
Structural and morphological studies on SiOxNy thin films
Authors
Keywords
-
Journal
JOURNAL OF NON-CRYSTALLINE SOLIDS
Volume 354, Issue 19-25, Pages 2809-2815
Publisher
Elsevier BV
Online
2008-02-07
DOI
10.1016/j.jnoncrysol.2007.09.063

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