Electrical, optical and structural investigation of plasma-enhanced chemical-vapor-deposited amorphous silicon oxynitride films for solar cell applications

Published 2012 View Full Article

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Title
Electrical, optical and structural investigation of plasma-enhanced chemical-vapor-deposited amorphous silicon oxynitride films for solar cell applications
Authors
Keywords
-
Journal
SOLAR ENERGY MATERIALS AND SOLAR CELLS
Volume 108, Issue -, Pages 180-188
Publisher
Elsevier BV
Online
2012-10-23
DOI
10.1016/j.solmat.2012.09.025

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