In-situ XPS study of ALD ZnO passivation of p-In0.53Ga0.47As

Title
In-situ XPS study of ALD ZnO passivation of p-In0.53Ga0.47As
Authors
Keywords
In<sub>0.53</sub>Ga<sub>0.47</sub>As, interface passivation, HfO<sub>2</sub>, ZnO, capacitance-voltage
Journal
Electronic Materials Letters
Volume 11, Issue 5, Pages 769-774
Publisher
Springer Nature
Online
2015-09-10
DOI
10.1007/s13391-015-5150-6

Ask authors/readers for more resources

Reprint

Contact the author

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Publish scientific posters with Peeref

Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.

Learn More