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Title
In-situ XPS study of ALD ZnO passivation of p-In0.53Ga0.47As
Authors
Keywords
In<sub>0.53</sub>Ga<sub>0.47</sub>As, interface passivation, HfO<sub>2</sub>, ZnO, capacitance-voltage
Journal
Electronic Materials Letters
Volume 11, Issue 5, Pages 769-774
Publisher
Springer Nature
Online
2015-09-10
DOI
10.1007/s13391-015-5150-6
References
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