Deposition of ZnO based thin films by atmospheric pressure spatial atomic layer deposition for application in solar cells

Title
Deposition of ZnO based thin films by atmospheric pressure spatial atomic layer deposition for application in solar cells
Authors
Keywords
-
Journal
Journal of Renewable and Sustainable Energy
Volume 9, Issue 2, Pages 021203
Publisher
AIP Publishing
Online
2017-04-07
DOI
10.1063/1.4979822

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