Deposition of ZnO based thin films by atmospheric pressure spatial atomic layer deposition for application in solar cells
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Title
Deposition of ZnO based thin films by atmospheric pressure spatial atomic layer deposition for application in solar cells
Authors
Keywords
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Journal
Journal of Renewable and Sustainable Energy
Volume 9, Issue 2, Pages 021203
Publisher
AIP Publishing
Online
2017-04-07
DOI
10.1063/1.4979822
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