Damage at hydrogenated amorphous/crystalline silicon interfaces by indium tin oxide overlayer sputtering

Title
Damage at hydrogenated amorphous/crystalline silicon interfaces by indium tin oxide overlayer sputtering
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 101, Issue 17, Pages 171604
Publisher
AIP Publishing
Online
2012-10-25
DOI
10.1063/1.4764529

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