Effect of Silicon Conductivity and HF/H2O2 Ratio on Morphology of Silicon Nanostructures Obtained via Metal-Assisted Chemical Etching

Title
Effect of Silicon Conductivity and HF/H2O2 Ratio on Morphology of Silicon Nanostructures Obtained via Metal-Assisted Chemical Etching
Authors
Keywords
silicon, metal-assisted chemical etching, conductivity, etchant, nanowire
Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 47, Issue 2, Pages 1583-1588
Publisher
Springer Nature
Online
2017-11-30
DOI
10.1007/s11664-017-5964-0

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