Microstructure analysis of silicon nanocrystals formed from silicon rich oxide with high excess silicon: Annealing and doping effects
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Title
Microstructure analysis of silicon nanocrystals formed from silicon rich oxide with high excess silicon: Annealing and doping effects
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 122, Issue 2, Pages 025102
Publisher
AIP Publishing
Online
2017-07-10
DOI
10.1063/1.4990983
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