Phosphorus doping of Si nanocrystals embedded in silicon oxynitride determined by atom probe tomography

Title
Phosphorus doping of Si nanocrystals embedded in silicon oxynitride determined by atom probe tomography
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 115, Issue 3, Pages 034304
Publisher
AIP Publishing
Online
2014-01-20
DOI
10.1063/1.4862174

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