Phosphorus doping of Si nanocrystals embedded in silicon oxynitride determined by atom probe tomography
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Title
Phosphorus doping of Si nanocrystals embedded in silicon oxynitride determined by atom probe tomography
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 115, Issue 3, Pages 034304
Publisher
AIP Publishing
Online
2014-01-20
DOI
10.1063/1.4862174
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