Subsurface damage from helium ions as a function of dose, beam energy, and dose rate

Published 2009 View Full Article

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Title
Subsurface damage from helium ions as a function of dose, beam energy, and dose rate
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 6, Pages 3244
Publisher
American Vacuum Society
Online
2009-12-15
DOI
10.1116/1.3237101

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