Monte Carlo simulations of nanoscale focused neon ion beam sputtering of copper: elucidating resolution limits and sub-surface damage

Characterisation of Ion Implantation-induced Defects in Certain Technologically Important Materials by Positron Annihilation

(2014) P. Nambissan   DEFENCE SCIENCE JOURNAL

Novel nanosample preparation with a helium ion microscope

(2013) Maria Rudneva et al.   JOURNAL OF MATERIALS RESEARCH

Focused helium ion beam deposited low resistivity cobalt metal lines with 10 nm resolution: implications for advanced circuit editing

(2013) H. Wu et al.   JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS

The Effect of He Implantation on the Tensile Properties and Microstructure of Cu/Fe Nano-Bicrystals

(2012) Peri Landau et al.   ADVANCED FUNCTIONAL MATERIALS

Imaging and Nanofabrication With the Helium Ion Microscope of the Van Leeuwenhoek Laboratory in Delft

(2012) Paul F. A. Alkemade et al.   SCANNING

Helium Implantation Effects on the Compressive Response of Cu Nanopillars

(2012) Qiang Guo et al.   Small

Observation of synchronized atomic motions in the field ion microscope

(2012) FHM F. Rahman et al.   ULTRAMICROSCOPY

The neon gas field ion source—a first characterization of neon nanomachining properties

(2011) Richard H. Livengood et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT

Modeling the Point-Spread Function in Helium-Ion Lithography

(2011) Donald Winston et al.   SCANNING

The Prospects of a Subnanometer Focused Neon Ion Beam

(2011) F. H. M. Rahman et al.   SCANNING

Etching of Graphene Devices with a Helium Ion Beam

(2009) Max C. Lemme et al.   ACS Nano

Beam induced deposition of platinum using a helium ion microscope

(2009) Colin A. Sanford et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Proximity effect in ion-beam-induced deposition of nanopillars

(2009) Ping Chen et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Understanding imaging modes in the helium ion microscope

(2009) Larry Scipioni et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Sub-10-nm nanolithography with a scanning helium beam

(2009) Vadim Sidorkin et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Subsurface damage from helium ions as a function of dose, beam energy, and dose rate

(2009) Richard Livengood et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Simulation of focused ion beam etching by coupling a topography simulator and a Monte-Carlo sputtering yield simulator

(2009) D. Kunder et al.   MICROELECTRONIC ENGINEERING

Contrast Mechanisms and Image Formation in Helium Ion Microscopy

(2009) David C. Bell   MICROSCOPY AND MICROANALYSIS

Simulating the effects of surface diffusion on electron beam induced deposition via a three-dimensional Monte Carlo simulation

(2008) Daryl A Smith et al.   NANOTECHNOLOGY

Helium ion microscopy and its application to nanotechnology and nanometrology

(2008) Michael T. Postek et al.   SCANNING