Pulsed Laser-Assisted Focused Electron-Beam-Induced Etching of Titanium with XeF2: Enhanced Reaction Rate and Precursor Transport

Published 2015 View Full Article

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Title
Pulsed Laser-Assisted Focused Electron-Beam-Induced Etching of Titanium with XeF2: Enhanced Reaction Rate and Precursor Transport
Authors
Keywords
-
Journal
ACS Applied Materials & Interfaces
Volume 7, Issue 7, Pages 4179-4184
Publisher
American Chemical Society (ACS)
Online
2015-01-29
DOI
10.1021/am508443s

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