Kinetic interpretation of resonance phenomena in low pressure capacitively coupled radio frequency plasmas

On the self-excitation mechanisms of plasma series resonance oscillations in single- and multi-frequency capacitive discharges

(2015) Edmund Schüngel et al.   PHYSICS OF PLASMAS

Studies on the effect of finite geometrical asymmetry in dual capacitively coupled radio frequency plasma

(2015) B Bora   PLASMA SOURCES SCIENCE & TECHNOLOGY

Electron heating via self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas

(2015) E Schüngel et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

The effect of the driving frequency on the confinement of beam electrons and plasma density in low-pressure capacitive discharges

(2015) S Wilczek et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Electron heating in capacitively coupled plasmas revisited

(2014) T Lafleur et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Equivalence of the hard-wall and kinetic-fluid models of collisionless electron heating in capacitively coupled discharges

(2014) T Lafleur et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas

(2014) J Schulze et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Multiple frequency capacitively coupled plasmas as a new technology for sputter processes

(2013) S Bienholz et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Simulation study of wave phenomena from the sheath region in single frequency capacitively coupled plasma discharges; field reversals and ion reflection

(2013) S. Sharma et al.   PHYSICS OF PLASMAS

Simulation benchmarks for low-pressure plasmas: Capacitive discharges

(2013) M. M. Turner et al.   PHYSICS OF PLASMAS

Theoretical approach for plasma series resonance effect in geometrically symmetric dual radio frequency plasma

(2012) B. Bora et al.   APPLIED PHYSICS LETTERS

The 2012 Plasma Roadmap

(2012) Seiji Samukawa et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Experimental validation and simulation of collisionless bounce-resonance heating in capacitively coupled radio-frequency discharges

(2012) Yong-Xin Liu et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Collisionless Bounce Resonance Heating in Dual-Frequency Capacitively Coupled Plasmas

(2011) Yong-Xin Liu et al.   PHYSICAL REVIEW LETTERS

Measurements of time average series resonance effect in capacitively coupled radio frequency discharge plasma

(2011) B. Bora et al.   PHYSICS OF PLASMAS

Particle simulation methods for studies of low-pressure plasma sources

(2011) Zoltán Donkó   PLASMA SOURCES SCIENCE & TECHNOLOGY

Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges

(2009) Z. Donkó et al.   APPLIED PHYSICS LETTERS

Collisionless heating in radio-frequency discharges: a review

(2009) M M Turner   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Plasma Ionization in Low-Pressure Radio-Frequency Discharges. Part I: Optical Measurements

(2008) Deborah O'Connell et al.   IEEE TRANSACTIONS ON PLASMA SCIENCE

Electric field reversals in the sheath region of capacitively coupled radio frequency discharges at different pressures

(2008) J Schulze et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Electron beams in asymmetric capacitively coupled radio frequency discharges at low pressures

(2008) J Schulze et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Stochastic heating in asymmetric capacitively coupled RF discharges

(2008) J Schulze et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Enhancement of Ohmic and Stochastic Heating by Resonance Effects in Capacitive Radio Frequency Discharges: A Theoretical Approach

(2008) T. Mussenbrock et al.   PHYSICAL REVIEW LETTERS

The effects of nonlinear series resonance on Ohmic and stochastic heating in capacitive discharges

(2008) M. A. Lieberman et al.   PHYSICS OF PLASMAS