Stochastic heating in asymmetric capacitively coupled RF discharges

Electron Beams in Capacitively Coupled Radio-Frequency Discharges

(2008) J. Schulze et al.   IEEE TRANSACTIONS ON PLASMA SCIENCE

Numerical Modeling of Electron Beams Accelerated by the Radio Frequency Boundary Sheath

(2008) Brian G. Heil et al.   IEEE TRANSACTIONS ON PLASMA SCIENCE

Electric field reversals in the sheath region of capacitively coupled radio frequency discharges at different pressures

(2008) J Schulze et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Electron beams in asymmetric capacitively coupled radio frequency discharges at low pressures

(2008) J Schulze et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric

(2008) Brian G Heil et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Enhancement of Ohmic and Stochastic Heating by Resonance Effects in Capacitive Radio Frequency Discharges: A Theoretical Approach

(2008) T. Mussenbrock et al.   PHYSICAL REVIEW LETTERS

The effects of nonlinear series resonance on Ohmic and stochastic heating in capacitive discharges

(2008) M. A. Lieberman et al.   PHYSICS OF PLASMAS

Nonlinear dynamics of dual frequency capacitive discharges: a global model matched to an experiment

(2008) Dennis Ziegler et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Skin effect in a small symmetrically driven capacitive discharge

(2008) Thomas Mussenbrock et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY