Journal
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 36, Issue 4, Pages 1382-1383Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TPS.2008.927348
Keywords
capacitively coupled plasmas; electric field reversal; phase resolved optical emission spectroscopy; plasma diagnostics; plasma ionization; radio-frequency plasmas; wave-particle interaction
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Funding
- EPSRC [EP/D06337X/1] Funding Source: UKRI
- Engineering and Physical Sciences Research Council [EP/D06337X/1] Funding Source: researchfish
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The electron dynamics in the low-pressure operation regime (< 5 Pa) of a neon capacitively coupled plasma is investigated using phase-resolved optical emission spectroscopy. Plasma ionization and sustainment mechanisms are governed by the expanding and contracting sheath and complex wave-particle interactions. Electrons are energized through the advancing and retreating electric field of the RF sheath. The associated interaction of energetic sheath electrons with thermal bulk plasma electrons drives a two-stream instability also dissipating power in the plasma.
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