On the self-excitation mechanisms of plasma series resonance oscillations in single- and multi-frequency capacitive discharges

On the electrical asymmetry effect in large area multiple frequency capacitively coupled plasmas

(2014) S Bienholz et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Influence of finite geometrical asymmetry of the electrodes in capacitively coupled radio frequency plasma

(2014) B. Bora et al.   PHYSICS OF PLASMAS

Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms

(2014) B Bruneau et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas

(2014) B Bruneau et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Measurements of plasma parameters in capacitively coupled radio frequency plasma from discharge characteristics: Correlation with optical emission spectroscopy

(2013) B. Bora et al.   CURRENT APPLIED PHYSICS

Analytical model for the radio-frequency sheath

(2013) Uwe Czarnetzki   PHYSICAL REVIEW E

“Anomalous” collisionality in low-pressure plasmas

(2013) T. Lafleur et al.   PHYSICS OF PLASMAS

Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms

(2013) A Derzsi et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Theoretical approach for plasma series resonance effect in geometrically symmetric dual radio frequency plasma

(2012) B. Bora et al.   APPLIED PHYSICS LETTERS

The electrical asymmetry effect in geometrically asymmetric capacitive radio frequency plasmas

(2012) E. Schüngel et al.   JOURNAL OF APPLIED PHYSICS

Hydrogenated microcrystalline silicon thin films deposited by RF-PECVD under low ion bombardment energy using voltage waveform tailoring

(2012) E.V. Johnson et al.   JOURNAL OF NON-CRYSTALLINE SOLIDS

Nonlinear Plasma Dynamics in Electron Heating of Asymmetric Capacitive Discharges with a Fluid Sheath Model

(2011) Zhong-Ling Dai et al.   CHINESE PHYSICS LETTERS

Measurements of time average series resonance effect in capacitively coupled radio frequency discharge plasma

(2011) B. Bora et al.   PHYSICS OF PLASMAS

The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

(2011) J Schulze et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Charge dynamics in capacitively coupled radio frequency discharges

(2010) J Schulze et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Nanocrystalline silicon film growth morphology control through RF waveform tailoring

(2010) Erik V Johnson et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

The influence of the relative phase between the driving voltages on electron heating in asymmetric dual frequency capacitive discharges

(2010) D Ziegler et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Effect of the resonant growth of harmonics on the electron density in capacitively coupled plasma

(2009) Yohei Yamazawa   APPLIED PHYSICS LETTERS

Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges

(2009) Z. Donkó et al.   APPLIED PHYSICS LETTERS

Stochastic heating in asymmetric capacitively coupled RF discharges

(2008) J Schulze et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric

(2008) Brian G Heil et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect

(2008) Z Donkó et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Enhancement of Ohmic and Stochastic Heating by Resonance Effects in Capacitive Radio Frequency Discharges: A Theoretical Approach

(2008) T. Mussenbrock et al.   PHYSICAL REVIEW LETTERS

Nonlinear dynamics of dual frequency capacitive discharges: a global model matched to an experiment

(2008) Dennis Ziegler et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY