Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 13, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3110056
Keywords
discharges (electric); plasma oscillations; plasma radiofrequency heating; plasma simulation
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Funding
- Hungarian Fund for Scientific Research [OTKA T048389, IN69892, K77653]
- DFG [GRK 1051]
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At low pressures, nonlinear self-excited plasma series resonance (PSR) oscillations are known to drastically enhance electron heating in geometrically asymmetric capacitively coupled radio frequency discharges by nonlinear electron resonance heating (NERH). Here we demonstrate via particle-in-cell simulations that high-frequency PSR oscillations can also be excited in geometrically symmetric discharges if the driving voltage waveform makes the discharge electrically asymmetric. This can be achieved by a dual-frequency (f+2f) excitation, when PSR oscillations and NERH are turned on and off depending on the electrical discharge asymmetry, controlled by the phase difference of the driving frequencies.
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